1. Low hydrogen peroxide Consumption Organic compounds and silicon wafer surface impurities can be removed under extremely low hydrogen peroxide dosage conditions 2. Consumption reduction No need to replenish alkali during the experiment, while significantly reducing the consumption of H2O2 3. Stronger cleaning effect Enhance the cleaning effect of the system, with no residual components and optimized yield 4. Wide applicability Can be applied to the pre - and post cleaning processes of different wet process stages
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